Vacuum pump stations with different principles
Let us introduce you to two of the most used systems.
In the first system, the rotary pump plays the most important role. It achieves a very high volume flow, but needs a booster pump, since its difference pressure must not be more than 80 mbar (customised design). Booster pumps include dry (almost contamination-free) and lubricated vacuum pumps. The end pressure in this booster pump combination improves exponentially by ≤ 0.8 mbar.
Another variety is the turbo molecular pump when very low end pressure is needed (maximum <1-10-7 mbar). The turbo molecular pump works only after a pressure of 2 mbar. In order to reach this pressure, a booster pump or booster pump system will still be required. It can either be a two-stage lubricated rotary valve vacuum pump or a combination of rotary valve vacuum pumps and rotary pumps. If a dry system is required in order to avoid contamination in the process (oil back-diffusion), we use a scroll vacuum or membrane vacuum pump.
